Accurate Friction Compensation for a High Precision Stage using a Synchronous Piezoelectric Device Driver
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- Minh Truong Ngoc
- Nagaoka University of Technology
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- Ohishi Kiyoshi
- Nagaoka University of Technology
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- Takata Masasuke
- Nagaoka University of Technology
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- Hashimoto Seiji
- Gunma University
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- Kosaka Kouji
- Tech-concierge Kumamoto Inc.
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- Kubota Hiroshi
- Kumamoto University
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- Ohmi Tadahiro
- Tohoku University
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It is well-known that one of the major limitations to achieve a good performance in mechanical systems is the presence of friction. High resolution positioning systems operating with accuracies in nanometer region usually exhibit relatively large steady-state tracking errors or even oscillations if controllers are designed without considering friction. Consequently, this paper aims at improving the position control of a high precision stage using a synchronous piezoelectric device driver (SPIDER) by comparing the performances of three friction compensators. These friction compensators detect friction in the system and use this information to modify the control input. The first using bang-bang control is based on the well-known static friction model. The second is a friction state observer based on the dynamic friction LuGre model, and the third is a feed-forward compensator based on the LuGre model. In order to effect a fair comparison, three friction compensators uses the same identified friction parameters in controller synthesis. The performance comparisons are presented by means of experimental results on the proposed high precision stage using SPIDER.
収録刊行物
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- 電気学会論文誌Ｄ（産業応用部門誌）
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電気学会論文誌Ｄ（産業応用部門誌） 127 (1), 44-51, 2007
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390001204657731968
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- NII論文ID
- 10018660455
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- NII書誌ID
- AN10012320
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- ISSN
- 13488163
- 09136339
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- NDL書誌ID
- 8623203
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
