Effects of Vacuum Ultraviolet Light Illumination on the Residual Stress in Sol-Gel-derived Titanium Dioxide Films

  • ARIMITSU Naoki
    Department of Metallurgy and Ceramic Science, Graduate School of Engineering, Tokyo Institute of Technology
  • NAKAJIMA Akira
    Department of Metallurgy and Ceramic Science, Graduate School of Engineering, Tokyo Institute of Technology
  • SAITO Keisuke
    BRUKER AXS K.K.
  • KAMESHIMA Yoshikazu
    Department of Metallurgy and Ceramic Science, Graduate School of Engineering, Tokyo Institute of Technology
  • OKADA Kiyoshi
    Department of Metallurgy and Ceramic Science, Graduate School of Engineering, Tokyo Institute of Technology

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詳細情報 詳細情報について

  • CRID
    1574231875119931264
  • NII論文ID
    10018663371
  • NII書誌ID
    AA00603318
  • ISSN
    03667022
  • 本文言語コード
    en
  • データソース種別
    • CiNii Articles

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