Durability Improvement of Diamond-like Carbon Films by Nano-Structure

• BAN Masahito

  Faculty of Engineering, Nippon Institute of Technology

Bibliographic Information

Other Title

• ナノ構造化炭素系薄膜の進展　　ナノ構造化によるＤＬＣ膜の耐久性向上
• ナノ構造化によるDLC膜の耐久性向上
• ナノ コウゾウカ ニ ヨル DLC マク ノ タイキュウ セイコウ ジョウ

Journal

• Journal of The Surface Finishing Society of Japan

  Journal of The Surface Finishing Society of Japan 58 (1), 23-27, 2007

  The Surface Finishing Society of Japan

Keywords

• Diamond-like Carbon
• Internal Stress
• Low Friction
• Durability
• Nano-Structure

Details

• CRID: 1390001204117487360
• NII Article ID: 10018703756
• NII Book ID: AN1005202X
• DOI: 10.4139/sfj.58.23
• COI: 1:CAS:528:DC%2BD2sXktFyguro%3D
• ISSN: 18843409
• ISSN: 09151869
• NDL BIB ID: 8658843
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8658843
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles