Laser THz Emission Microscope for LSI Failure Analysis

• YAMASHITA M.

  RIKEN

• NIKAWA K.

  NEC Electron

• TONOUCHI M.

  Institute of Laser Engineering, Osaka Univ.

• OTANI C.

  RIKEN

• KAWASE K.

  Nagoya Univ.

Bibliographic Information

Other Title

• レーザーテラヘルツエミッション顕微鏡のLSI故障解析への応用

Journal

• レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan

  レーザー学会研究会報告 = Reports on the Topical meeting of the Laser Society of Japan 357 1-4, 2007-01-17

Details

• CRID: 1573668925167580032
• NII Article ID: 10018703824
• NII Book ID: AA11604414
• Text Lang: ja
• Data Source:
  • CiNii Articles