# New Technique for Fabrication of Individual Carbon-Nanotube Field Emitters

## Abstract

Currently, field emission experiments on individual carbon nanotubes (CNTs) are carried out by placing the CNTs inside a transmission electron microscope. In this work we report an alternative method of fabricating and measuring individual multiwalled CNT-field emitters fabricated on a silicon substrate by the e-beam lithography technique. A field emission experiment is then performed in a high-vacuum system for CNTs with various radii, lengths, interelectrode separations and tip structures. The geometrical enhancement factors $\beta$ exhibit three ranges: low ($\beta\sim 10$), medium ($\beta\sim 100$) and high ($\beta>200$) depending on whether the CNT tip is closed-tipped, open-tipped with a flat end or open-tipped with an oblique-angle end, respectively. The turn-on voltage $V_{\text{to}}$ also depends on the tip structure and the lowest $V_{\text{to}}$ occurs in open-tipped-with-oblique-angle CNTs. The geometrical enhancement factor depends on the tube geometry via a linear equation $\beta=\beta_{0}(1+d/kr)$ with $k\approx 40$ and $\beta_{0}$ equals 163 and 53 for the high-$\beta$ and medium-$\beta$ lines, respectively, where $r$ is the radius and $d$ is the CNT tip-anode spacing. The new method may open a path leading to the integration of nanotube field emitters with other miniature devices using semiconductor integrating technology.

## Journal

• Jpn J Appl Phys

Jpn J Appl Phys 46(1), 430-433, 2007-01-15

INSTITUTE OF PURE AND APPLIED PHYSICS

## References:  17

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## Codes

• NII Article ID (NAID)
10018705695
• NII NACSIS-CAT ID (NCID)
AA10457675
• Text Lang
EN
• Article Type
ART
• Journal Type
大学紀要
• ISSN
0021-4922
• NDL Article ID
8607197
• NDL Source Classification
ZM35(科学技術--物理学)
• NDL Call No.
Z53-A375
• Data Source
CJP  NDL  JSAP

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