Development of Electrostatic Actuator, which enables the Stable Contact Resistance, Driven at Low Voltage

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The switches play an important role in making the multifunctional radio communication circuit and therefore, the high-performance microminiaturized high-frequency switches are urgently expected. RF-MEMS switch with mechanical switching structure is hoped to improve both high-frequency signal loss and isolation quality simultaneously and to provide better linearity on the performance and compatibility to silicon-based circuit elements. But considering the applications, such as cellular phone and wireless-LAN, lower driving voltage and smaller switch dimensions are required.<br>In order to solve these requirements, a novel electrostatic actuator with a unique structure of movable electrodes which enables the stable contact resistance is developed for RF-MEMS switches. This actuator has slits between the movable electrodes and the restoring spring. The electrostatic actuator with a movable electrode area of 0.5mm<sup>2</sup> was driven at low voltage of 9-11V. And no defect due to restoration shortage is observed during switching test up to 400million cycles.<br>In this paper, the results of mechanical design of the electrostatic actuator, the simulation, the experiments, and the reliability test are described

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  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 127(3), 116-120, 2007-03-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10018737701
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    8728607
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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