Application of the pn diode temperature sensor to the MEMS type vacuum sensor

• SAKURAI F.

収録刊行物

• Proc. of Thechnical Meeting on Physical Sensor, IEE Japan, 2005

  Proc. of Thechnical Meeting on Physical Sensor, IEE Japan, 2005 2005

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• CRID: 1570572700416264704
• NII論文ID: 10018737762
• データソース種別:
  • CiNii Articles