Fabrication and Characterization of 3-DOF Soft-Contact Tactile Sensor Utilizing 3-DOF Micro Force Moment Sensor

この論文にアクセスする

この論文をさがす

著者

抄録

This paper presents the design, fabrication and characterization of a 3-DOF (3-degree of freedom) highly sensitive soft-contact tactile (SCT) sensor, which utilizes micro force moment sensing (MFMS) chip. The MFMS chip is working based on the piezoresistive effect in silicon. The MFMS chip has been packaged to produce 3-DOF SCT sensor, which has the contact part is made of silicone rubber. The sensor can independently detect three components of force (<i>Fx', Fy', Fz'</i>) acting on the soft contact part of the sensor. The MFMS chip and the SCT sensor have been calibrated. The outputs were linear and the crosstalk was small.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 127(3), 177-181, 2007-03-01

    The Institute of Electrical Engineers of Japan

参考文献:  10件中 1-10件 を表示

各種コード

  • NII論文ID(NAID)
    10018737851
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    8728828
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
ページトップへ