Fabrication and Characterization of 3-DOF Soft-Contact Tactile Sensor Utilizing 3-DOF Micro Force Moment Sensor

• Dao Dzung Viet

  Center for Promotion of 21 Century COE Program, Ritsumeikan Univ.

• Wang Qiang

  Department of MicroSystems Technology, Ritsumeikan University

• Sugiyama Susumu

  Department of MicroSystems Technology, Ritsumeikan University

抄録

This paper presents the design, fabrication and characterization of a 3-DOF (3-degree of freedom) highly sensitive soft-contact tactile (SCT) sensor, which utilizes micro force moment sensing (MFMS) chip. The MFMS chip is working based on the piezoresistive effect in silicon. The MFMS chip has been packaged to produce 3-DOF SCT sensor, which has the contact part is made of silicone rubber. The sensor can independently detect three components of force (Fx', Fy', Fz') acting on the soft contact part of the sensor. The MFMS chip and the SCT sensor have been calibrated. The outputs were linear and the crosstalk was small.

収録刊行物

• 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）

  電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 127 (3), 177-181, 2007

  一般社団法人 電気学会

キーワード

• Piezoresistive effect
• 3-DOF micro force sensor
• Soft contact tactile sensor
• Soft fingertip sensor

詳細情報

• CRID: 1390001204461734016
• NII論文ID: 10018737851
• NII書誌ID: AN1052634X
• DOI: 10.1541/ieejsmas.127.177
• ISSN: 13475525
• ISSN: 13418939
• NDL書誌ID: 8728828
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8728828
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/127/3/127_3_177/_pdf
• 本文言語コード: en
• データソース種別:
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  • NDL
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