Fabrication and Characterization of 3-DOF Soft-Contact Tactile Sensor Utilizing 3-DOF Micro Force Moment Sensor

• Dao Dzung Viet

  Center for Promotion of 21 Century COE Program, Ritsumeikan Univ.

• Wang Qiang

  Department of MicroSystems Technology, Ritsumeikan University

• Sugiyama Susumu

  Department of MicroSystems Technology, Ritsumeikan University

Abstract

This paper presents the design, fabrication and characterization of a 3-DOF (3-degree of freedom) highly sensitive soft-contact tactile (SCT) sensor, which utilizes micro force moment sensing (MFMS) chip. The MFMS chip is working based on the piezoresistive effect in silicon. The MFMS chip has been packaged to produce 3-DOF SCT sensor, which has the contact part is made of silicone rubber. The sensor can independently detect three components of force (Fx', Fy', Fz') acting on the soft contact part of the sensor. The MFMS chip and the SCT sensor have been calibrated. The outputs were linear and the crosstalk was small.

Journal

• IEEJ Transactions on Sensors and Micromachines

  IEEJ Transactions on Sensors and Micromachines 127 (3), 177-181, 2007

  The Institute of Electrical Engineers of Japan

Keywords

• Piezoresistive effect
• 3-DOF micro force sensor
• Soft contact tactile sensor
• Soft fingertip sensor

Details

• CRID: 1390001204461734016
• NII Article ID: 10018737851
• NII Book ID: AN1052634X
• DOI: 10.1541/ieejsmas.127.177
• ISSN: 13475525
• ISSN: 13418939
• NDL BIB ID: 8728828
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8728828
• Web Site: http://www.jstage.jst.go.jp/article/ieejsmas/127/3/127_3_177/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed