ガスクラスターイオンビームの超低エネルギー照射効果 Low-Energy Irradiation Effects of Gas Cluster Ion Beams

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著者

    • 寳角 真吾 HOUZUMI Shingo
    • 兵庫県立大学大学院工学研究科 University of Hyogo, Graduate School of Engineering, Mechanical and System Engineering
    • 竹嶋 圭吾 TAKESHIMA Keigo
    • 兵庫県立大学大学院工学研究科 University of Hyogo, Graduate School of Engineering, Mechanical and System Engineering
    • 豊田 紀章 TOYODA Noriaki
    • 兵庫県立大学高度産業科学技術研究所 University of Hyogo, Laboratory of Advanced Science and Technology for Industry
    • 山田 公 YAMADA Isao
    • 兵庫県立大学高度産業科学技術研究所 University of Hyogo, Laboratory of Advanced Science and Technology for Industry

抄録

A cluster-ion irradiation system with cluster-size selection has been developed to study the effects of the cluster size for surface processes using cluster ions. A permanent magnet with a magnetic field of 1.2 T is installed for size separation of large cluster ions. Trace formations at HOPG surface by the irradiation with size-selected Ar-cluster ions under acceleration energy of 30 keV were investigated by a scanning tunneling microscopy. Generation behavior of the crater-like traces is strongly affected by the number of constituent atoms (cluster size) of the irradiating cluster ion. When the incident cluster ion is composed of 100 - 3000 atoms, crater-like traces are observed on the irradiated surfaces. In contrast, such traces are not observed at all with the irradiation of the cluster-ions composed of over 5000 atoms. Such the behavior is discussed on the basis of the kinetic energy per constituent atom of the cluster ion. To study GCIB irradiation effects against macromolecule, GCIB was irradiated on DNA molecules absorbed on graphite surface. By the GCIB irradiation, much more DNA molecules was sputtered away as compared with the monomer-ion irradiation.

収録刊行物

  • 電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society  

    電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society 127(3), 312-316, 2007-03-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10018738127
  • NII書誌ID(NCID)
    AN10065950
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    03854221
  • NDL 記事登録ID
    8728292
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-795
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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