Platinum Micro-Hotplates on Thermal Insulated Structure for Micro-Thermoelectric Gas Sensor

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In this paper, we investigate the properties of platinum heater micro-hotplates built on a thin dielectric membrane and used for the catalytic combustion of hydrogen in a micro-thermoelectric hydrogen gas sensor. The response of the micro-hotplates was studied with different working temperatures and a response time below 95 ms was determined at a working temeprature of 350°C. It's shown that the fabricated micro-hotplates can bear temperature as high as 600°C. Temperature measurements were carried out with an infrared camera and show an extremely sharp response of the catalyst to the temperature raise with a response time of less than 1s. The response of the hydrogen gas sensor fabricated with these micro-hotplates is reported at different temperature and for 1 v/v % hydrogen in air. The performance of the gas sensor is also examined with and without a micro-hotplate heat spreader located below the membrane. For a 70-μm-thick heat spreader, the heat dispersion from the membrane is enhanced. However, the hydrogen response of the gas sensor with the heat spreader is reduced 1/3 of the sensor without the heat spreader though the temperature distribution is more uniform below the catalyst.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 126(10), 568-572, 2006-10-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10018780334
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    8525918
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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