Electrostatically Controlled Linear Inchworm Actuator for Precise Step and Parallel Motion

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This paper presents electrostatically controlled linear inchworm actuator for precise step and parallel motion. Electrostatically controlled linear inchworm actuator can provide a high accuracy (nm order), a large stroke (mm order) and parallel motion of multi sliders. Micro electro mechanical systems technology allows batch fabricated multi sliders. Batch-fabricated multi sliders can be driven by a proposed strategy based on an inchworm motion. Electrostatically controlled linear inchworm actuator employs an electrostatic clutch mechanism in order to control motion transmission from a piezoelectric oscillator to multi sliders for the inchworm motion. Independent control of motions of multi sliders arranged on a single driving system with the piezoelectric oscillator will be presented. This paper reports design, fabrication and demonstration of a proposed system, followed by a prospect of our study toward dynamic gain equalizer as optical application.

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  • 電気学会論文誌. D, 産業応用部門誌 = The transactions of the Institute of Electrical Engineers of Japan. D, A publication of Industry Applications Society  

    電気学会論文誌. D, 産業応用部門誌 = The transactions of the Institute of Electrical Engineers of Japan. D, A publication of Industry Applications Society 126(10), 1325-1329, 2006-10-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10018780445
  • NII書誌ID(NCID)
    AN10012320
  • 本文言語コード
    ENG
  • 資料種別
    ART
  • ISSN
    09136339
  • NDL 記事登録ID
    8525935
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-1608
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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