Electrostatically Controlled Linear Inchworm Actuator for Precise Step and Parallel Motion

• Konishi Satoshi

  Ritsumeikan University

• Oshima Akiyoshi

  Ritsumeikan University

• Kinoshita Nobuhito

  Ritsumeikan University

• Kumagaya Ikuo

  Ritsumeikan University

• Kishi Takashi

  Ritsumeikan University

Abstract

This paper presents electrostatically controlled linear inchworm actuator for precise step and parallel motion. Electrostatically controlled linear inchworm actuator can provide a high accuracy (nm order), a large stroke (mm order) and parallel motion of multi sliders. Micro electro mechanical systems technology allows batch fabricated multi sliders. Batch-fabricated multi sliders can be driven by a proposed strategy based on an inchworm motion. Electrostatically controlled linear inchworm actuator employs an electrostatic clutch mechanism in order to control motion transmission from a piezoelectric oscillator to multi sliders for the inchworm motion. Independent control of motions of multi sliders arranged on a single driving system with the piezoelectric oscillator will be presented. This paper reports design, fabrication and demonstration of a proposed system, followed by a prospect of our study toward dynamic gain equalizer as optical application.

Journal

• IEEJ Transactions on Industry Applications

  IEEJ Transactions on Industry Applications 126 (10), 1325-1329, 2006

  The Institute of Electrical Engineers of Japan

Keywords

• MEMS
• linear actuator
• inchworm
• electrostatic clutch
• parallel motion

Details

• CRID: 1390282679635924096
• NII Article ID: 30024955987
• NII Article ID: 10018780445
• NII Book ID: AN10012320
• DOI: 10.1541/ieejias.126.1325
• ISSN: 13488163
• ISSN: 09136339
• NDL BIB ID: 8525935
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8525935
• Web Site: http://www.jstage.jst.go.jp/article/ieejias/126/10/126_10_1325/_pdf
• Text Lang: en
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed