ベッセルビームによる金属材料への微細溝加工

• 松岡 芳彦

  (独) 産業技術総合研究所先進製造プロセス研究部門

• 平澤 誠一

  (独) 産業技術総合研究所先進製造プロセス研究部門

書誌事項

タイトル別名

• Micro Grooving of Metallic Material Using a Bessel Beam
• ベッセルビーム ニ ヨル キンゾク ザイリョウ エ ノ ビサイ ミゾカコウ

抄録

A Bessel beam is suitable for laser micro fabrication because it possesses both a small focal spot on the order of microns and a deep focal depth on the order of centimeters. In the case of laser micro grooving in stainless steel using a Bessel beam, suitable processing conditions were investigated. The results were compared with the results of micro grooving using a focused beam with a convex lens. In the grooving with the Bessel beam, it was possible to increase the groove depth while the groove width was kept almost constant. On the other hand, in the grooving with the focused beam, both the groove depth and the groove width increased when the irradiation energy was increased. A micro groove with an aspect ratio of about 5 and a width of about 2 μm was produced in a 10 μm thick stainless steel foil using a Bessel beam.

収録刊行物

• レーザー研究

  レーザー研究 34 (12), 842-847, 2006

  一般社団法人 レーザー学会

キーワード

• Laser micro grooving
• Aspect ratio
• Axicon
• Bessel beam
• Laser ablation

詳細情報

• CRID: 1390001204646563584
• NII論文ID: 10018792575
• NII書誌ID: AN00255326
• DOI: 10.2184/lsj.34.842
• ISSN: 13496603
• ISSN: 03870200
• NDL書誌ID: 8619856
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8619856
• Web Site: https://www.jstage.jst.go.jp/article/lsj/34/12/34_842/_pdf
• 本文言語コード: ja
• データソース種別:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• 抄録ライセンスフラグ: 使用不可