ベッセルビームによる金属材料への微細溝加工 Micro Grooving of Metallic Material Using a Bessel Beam

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著者

    • 松岡 芳彦 MATSUOKA Yoshihiro
    • (独)産業技術総合研究所 先進製造プロセス研究部門 Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST)
    • 平澤 誠一 HIRASAWA Makoto
    • (独)産業技術総合研究所 先進製造プロセス研究部門 Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology (AIST)

抄録

A Bessel beam is suitable for laser micro fabrication because it possesses both a small focal spot on the order of microns and a deep focal depth on the order of centimeters. In the case of laser micro grooving in stainless steel using a Bessel beam, suitable processing conditions were investigated. The results were compared with the results of micro grooving using a focused beam with a convex lens. In the grooving with the Bessel beam, it was possible to increase the groove depth while the groove width was kept almost constant. On the other hand, in the grooving with the focused beam, both the groove depth and the groove width increased when the irradiation energy was increased. A micro groove with an aspect ratio of about 5 and a width of about 2 μm was produced in a 10 μm thick stainless steel foil using a Bessel beam.

収録刊行物

  • レーザー研究  

    レーザー研究 34(12), 842-847, 2006-12-15 

    The Laser Society of Japan

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各種コード

  • NII論文ID(NAID)
    10018792575
  • NII書誌ID(NCID)
    AN00255326
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    03870200
  • NDL 記事登録ID
    8619856
  • NDL 雑誌分類
    ZN33(科学技術--電気工学・電気機械工業--電子工学・電気通信)
  • NDL 請求記号
    Z16-1040
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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