Fabrication of ZnO Nanoparticles in Silica Glass by Ion Implantation Combined with Thermal Oxidation

• AMEKURA Hiroshi

  Quantum Beam Center, National Institute for Materials Science (NIMS)

• KISHIMOTO Naoki

  Quantum Beam Center, National Institute for Materials Science (NIMS)

Bibliographic Information

Other Title

• イオン注入熱酸化法によるシリカガラス中へのＺｎＯナノ粒子の形成
• イオン チュウニュウ ネツ サンカホウ ニ ヨル シリカ ガラスチュウ エノ ZnO ナノ リュウシ ノ ケイセイ

Journal

• Shinku

  Shinku 50 (2), 128-134, 2007

  The Vacuum Society of Japan

Keywords

• Electrical and Electronic Engineering
• Surfaces, Coatings and Films
• Condensed Matter Physics

Details

• CRID: 1390001204064703744
• NII Article ID: 10018851329
• NII Book ID: AN00119871
• DOI: 10.3131/jvsj.50.128
• ISSN: 18809413
• ISSN: 05598516
• NDL BIB ID: 8735234
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8735234
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
  • KAKEN