Realization of virtual sub chamber on active controlled pneumatic isolation table with pressure differentiator

• KAWASHIMA Kenji

  Tokyo Institute of Technology

• KATO Tomonori

  Tokyo Metropolitan College of Industrial Technology

• SAWAMOTO Koichi

  Tokyo Institute of Technology

• KAGAWA Toshiharu

  Tokyo Metropolitan College of Industrial Technology

Journal

• Precision Engineering

  Precision Engineering 31 (2), 139-145, 2007-02-01

Keywords

• Isolation table
• Active control
• Air-spring
• Pressure differentiator

Details

• CRID: 1571698600296746368
• NII Article ID: 10018869385
• NII Book ID: AA11537543
• ISSN: 01416359
• Text Lang: en
• Data Source:
  • CiNii Articles