液体スズターゲットによる高効率EUV光源の開発 [in Japanese] Development of an Efficient EUV Source by Use of a Liquid Tin Oxide Micro-Target [in Japanese]
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We report on a low-debris, efficient extreme ultraviolet (EUV) source by use of a liquid micro-target containing low-concentration tin oxide nano-particles. Conversion efficiency from a laser pulse energy to an in-band EUV energy (2% bandwidth (BW) and 2πIsr solid angle) depended on various experimental parameters, such as tin oxide concentration, laser intensity, and pulse separation time between dual laser pulses. By using a low concentration (6%) colloidal target together with dual laser pulses under the optimum separation time, we observed the EUV conversion efficiency of 1.2% with undetectable debris.
rle 35(3), 168-172, 2007-03-15
The Laser Society of Japan