Numerical Study of Neutral Gas Transport in Linear Plasma Device

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Possible methods of controlling the neutral gas pressure in a linear plasma device are numerically investigated. For this purpose, the neutral gas transport in argon plasma is calculated by means of Monte Carlo method. The code takes into account the self-elastic collisions along with the elastic neutral–ion and the electron impact ionization collisions. The effects of a baffle plate, the electron temperature, the pump speed, and plasma flow on the neutral density are evaluated within a range of experimental conditions. The baffle plate is found to affect the amount of neutral gas when the electron temperature is low and the plate is located close to a neutral source. As the electron temperature increases, electron ionization strongly enhances the recycling of neutral gas, thus making the role of the baffle plate weaker. It is clarified that the electron ionization is a key factor of the neutral transport in a linear plasma device with low density and low electron temperature.

収録刊行物

  • Japanese journal of applied physics. Pt. 1, Regular papers & short notes  

    Japanese journal of applied physics. Pt. 1, Regular papers & short notes 46(4A), 1680-1691, 2007-04-15 

    Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics

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各種コード

  • NII論文ID(NAID)
    10018901388
  • NII書誌ID(NCID)
    AA10457675
  • 本文言語コード
    EN
  • 資料種別
    ART
  • 雑誌種別
    大学紀要
  • ISSN
    0021-4922
  • NDL 記事登録ID
    8707406
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z53-A375
  • データ提供元
    CJP書誌  NDL  JSAP 
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