Comparison of Co films deposited by remote plasma atomic layer deposition method with cyclopentadienylcobalt dicarbonyl 〔CpCo(CO)2〕 and dicobalt octacarbonyl 〔Co2(CO)8〕

• Keunjun Kim

• Keunwoo Lee

• Sejin Han

書誌事項

タイトル別名

• Comparison of Co films deposited by remote plasma atomic layer deposition method with cyclopentadienylcobalt dicarbonyl CpCo CO 2 and dicobalt octacarbonyl Co2 CO 8

収録刊行物

• Japanese journal of applied physics. Part 2, Letters & express letters

  Japanese journal of applied physics. Part 2, Letters & express letters 46 (8-11), L173-176, 2007-03

  Tokyo : Japan Society of Applied Physics

キーワード

• remote plasma ALD
• cobalt
• CpCo(CO)2
• Co2(CO)8

詳細情報

• CRID: 1520291855234991872
• NII論文ID: 10018902957
• NII書誌ID: AA11906093
• ISSN: 00214922
• NDL書誌ID: 8695294
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I8695294
• 本文言語コード: en
• NDL 雑誌分類:
  • ZM35(科学技術--物理学)
• データソース種別:
  • NDL
  • CiNii Articles