Comparison of Co Films Deposited by Remote Plasma Atomic Layer Deposition Method with Cyclopentadienylcobalt Dicarbonyl [CpCo(CO)2] and Dicobalt Octacarbonyl [Co2(CO)8]

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著者

    • Park Taeyong
    • Division of Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea
    • Lee Youngjin
    • R&D Division, Hynix Semiconductor Inc., San 136-1, Ami-ri, Bubal-eup, Icheon-si, Kyoungi-do 467-701, Korea
    • Kim Jeongtae
    • R&D Division, Hynix Semiconductor Inc., San 136-1, Ami-ri, Bubal-eup, Icheon-si, Kyoungi-do 467-701, Korea
    • Yeom Seungjin
    • R&D Division, Hynix Semiconductor Inc., San 136-1, Ami-ri, Bubal-eup, Icheon-si, Kyoungi-do 467-701, Korea
    • Jeon Hyeongtag
    • Division of Materials Science and Engineering, Hanyang University, Seoul 133-791, Korea

抄録

Co films were deposited by a remote plasma atomic layer deposition (ALD) method using either cyclopentadienylcobalt dicarbonyl [CpCo(CO)2] or dicobalt octacarbonyl [Co2(CO)8] as the Co precursor. The Co films deposited with the Co2(CO)8 precursor showed a lower ALD process window (75–110 °C) and higher growth rate (${\sim}1.2$ Å/cycle) than the Co films deposited with CpCo(CO)2 which had a process window of 125–175 °C and a growth rate of ${\sim}1.1$ Å/cycle. The Co films deposited using CpCo(CO)2 showed an oxygen content of less than 1% with both the H2 and N2 plasma and about 13% carbon with the N2 plasma and about 7–8% carbon with the H2 plasma. In the case of Co2(CO)8, the carbon and oxygen contents were ${\sim}15$ and ${\sim}2$% with the H2 plasma, and ${\sim}8$ and ${\sim}21$% with the N2 plasma, respectively. The carbon impurities in the Co films deposited with CpCo(CO)2 had a significant number of C–H bonds while Co–C bonds were dominant in the Co films deposited with Co2(CO)8. The retardation of silicide formation temperature up to 100 °C for the Co films deposited with Co2(CO)8 can be explained by high carbon content including Co–C bonds.

収録刊行物

  • Japanese journal of applied physics. Pt. 2, Letters  

    Japanese journal of applied physics. Pt. 2, Letters 46(8), L173-L176, 2007-03-25 

    Japan Society of Applied Physics

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各種コード

  • NII論文ID(NAID)
    10018902957
  • NII書誌ID(NCID)
    AA10650595
  • 本文言語コード
    EN
  • 資料種別
    SHO
  • ISSN
    0021-4922
  • NDL 記事登録ID
    8695294
  • NDL 雑誌分類
    ZM35(科学技術--物理学)
  • NDL 請求記号
    Z54-J337
  • データ提供元
    CJP書誌  NDL  JSAP 
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