Wavelength Tuning of Double-Cavity Micromachined Filter with Electrical and Thermal Actuations

• JANTO Wiganes

  Microsystem Research Center, Precision and Intelligence Laboratory, Tokyo Institute of Technology

• MATSUTANI Akihiro

  Microsystem Research Center, Precision and Intelligence Laboratory, Tokyo Institute of Technology

• KOYAMA Fumio

  Microsystem Research Center, Precision and Intelligence Laboratory, Tokyo Institute of Technology

Journal

• Optical review

  Optical review 14 (2), 86-90, 2007-04-01

Keywords

• micromachined filter
• double cavity
• electrical actuation
• electrostatics
• thermal actuation
• switching time

Details

• CRID: 1571980075271994496
• NII Article ID: 10018912664
• NII Book ID: AA11029291
• ISSN: 13406000
• Text Lang: en
• Data Source:
  • CiNii Articles