Design of Linear-motion Microactuators Using Piezoelectric Thin Films
収録刊行物
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- J. Micromech. Microeng.
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J. Micromech. Microeng. 1 247-252, 1991
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- CRID
- 1573668925143565696
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- NII論文ID
- 10018971859
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- データソース種別
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- CiNii Articles