Modelling of Ferro-Electric Packed Bed Non-thermal Plasma Reactor for C_2F_6 and CF_4 Treatments

• CHANG J. S.

  Department of Engineering Physics, McMaster University

• TAKAKI K.

  Department of Electrical Engineering, Iwate University

Journal

• 電気学会研究会資料. PST, プラズマ研究会

  電気学会研究会資料. PST, プラズマ研究会 2001 (91), 5-10, 2001-12-08

Keywords

• non-thermal plasma parameter
• PFC pollution control
• ferro-electric packed bed
• modelling
• radical and ion chemistry

Details

• CRID: 1573950400159592192
• NII Article ID: 10018980642
• NII Book ID: AA11501025
• Text Lang: en
• Data Source:
  • CiNii Articles