Two-dimensional velocity distribution function of electrons in an inductively coupled radio frequency plasma

• FUJITA Hiroharu

  Department of Electrical and Electronic Engineering, Saga University

• CICMAN Peter

  Department of Electrical and Electronic Engineering, Saga University

• OHTSU Yasunori

  Department of Electrical and Electronic Engineering, Saga University

Bibliographic Information

Other Title

• 誘導結合型高周波プラズマにおける電子2次元速度分布関数

Journal

• 電気学会研究会資料. PST, プラズマ研究会

  電気学会研究会資料. PST, プラズマ研究会 2001 (81), 17-19, 2001-12-07

Keywords

• inductively coupled RF plasma
• electron velocity distribution function
• directional analyzer

Details

• CRID: 1573105975229218432
• NII Article ID: 10018980737
• NII Book ID: AA11501025
• Text Lang: ja
• Data Source:
  • CiNii Articles