Abatement of CF4 Using Atmospheric Pressure discharge Plasma

• ITATANI Ryohei

  Niihama National College of Technology

• DEGUCHI Mikio

  Niihama National College of Technology

• TODA Toshihiko

  Youth Engineering Co., LTD.

• BAN Heitaro

  THREE TECH Co., LTD.

Journal

• 電気学会研究会資料. PST, プラズマ研究会

  電気学会研究会資料. PST, プラズマ研究会 2001 (1), 39-40, 2001-04-19

Details

• CRID: 1570572700438962688
• NII Article ID: 10018981487
• NII Book ID: AA11501025
• Text Lang: en
• Data Source:
  • CiNii Articles