Inprovement of deposition rate by magnetic drive of shunting arc plasma

• TAKAKI Koichi

  Iwate University

• HASEGAWA Ryuji

  Iwate University

• MUKAIGAWA Seiji

  Iwate University

• NAKAMURA Satoru

  Iwate University

• FUJIWARA Tamiya

  Iwate University

• KUMAGAI Motoya

  Doshisha University

• YUKIMURA Ken

  Doshisha University

Bibliographic Information

Other Title

• 磁気駆動を用いたシャンティングアークプラズマ成膜の速度改善

Journal

• 電気学会研究会資料. ED, 放電研究会

  電気学会研究会資料. ED, 放電研究会 2003 (122), 23-28, 2003-10-06

Keywords

• Arc discharge
• Shunting arc
• Amorphous carbon
• DLC
• Magnetic drive

Details

• CRID: 1570291225462118400
• NII Article ID: 10018985154
• NII Book ID: AN10320559
• Text Lang: ja
• Data Source:
  • CiNii Articles