Characteristics of the byproducts in CF_4 decomposition process by high frequency plasma

Bibliographic Information

Other Title
  • 放電プラズマによるフルオロカーボン分解過程における副生成物の発生特性

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Details

  • CRID
    1573105975229223168
  • NII Article ID
    10018985177
  • NII Book ID
    AN10320559
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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