Ferro-Electric Pellet Shape Effect on C_2F_6 Removal by a Packed Bed Type Non-Thermal Plasma Reactor

• TAKAKI Koichi

  Iwate University

• URASHIMA Kuniko

  NISTEP, Min. Edu. Sci. & Tech. Japan

• CHANG J. S.

  McMaster University

Bibliographic Information

Other Title

• 強誘電体ペレットDBDリアクタC_2F_6分解のペレット形状依存性

Journal

• 電気学会研究会資料. ED, 放電研究会

  電気学会研究会資料. ED, 放電研究会 2003 (122), 41-46, 2003-10-06

Keywords

• Packed bed
• dielectric barrier discharge
• non-thermal plasma
• partial discharge
• ferro-electric
• C_2F_6
• PFCs
• Semiconductor process flue gas

Details

• CRID: 1573950400159356160
• NII Article ID: 10018985180
• NII Book ID: AN10320559
• Text Lang: ja
• Data Source:
  • CiNii Articles