Preparation of ZrO_2 Thin Film Using Inductively Coupled Plasma Sputtering

Bibliographic Information

Other Title
  • 誘導結合型プラズマスパッタリングによる酸化ジルコニウム薄膜合成

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Details

  • CRID
    1573105975229242368
  • NII Article ID
    10018985515
  • NII Book ID
    AN10320559
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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