Influence of Polymer Powder Injection on Ar Inductively Coupled Thermal Plasma

• NUMADA Toru

  Kanazawa University

• TANAKA Yasunori

  Kanazawa University

• SAKUTA Tadahiro

  Kanazawa University

• UCHII Toshiyuki

  Toshiba Corporation

• SUZUKI Katsumi

  Toshiba Corporation

Bibliographic Information

Other Title

• 高分子材料パウダ混入のAr誘導熱プラズマへの影響

Journal

• 電気学会研究会資料. ED, 放電研究会

  電気学会研究会資料. ED, 放電研究会 2002 (41), 1-6, 2002-06-04

Keywords

• Inductively coupled thermal plasma
• Polymer
• Ar excitation temperature
• Transport and thermodynamic properties

Details

• CRID: 1572543025276369664
• NII Article ID: 10018986585
• NII Book ID: AN10320559
• Text Lang: ja
• Data Source:
  • CiNii Articles