Change in Plasma Impedance by Various Gas Injection into Ar Thermal ICP at Atmospheric Pressure

Bibliographic Information

Other Title
  • 誘導熱プラズマを用いた各種ガスの消弧性能診断手法の検討

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Details 詳細情報について

  • CRID
    1573105975229422464
  • NII Article ID
    10018987883
  • NII Book ID
    AN10320559
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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