Development status and technical issues of EPL tool

• FUJIWARA Tomoharu

  Nikon Corporation

Bibliographic Information

Other Title

• EPL露光装置の開発状況と課題

Journal

• 電気学会研究会資料. LAV, 光応用・視覚研究会

  電気学会研究会資料. LAV, 光応用・視覚研究会 2001 (20), 19-24, 2001-11-05

Keywords

• Electron beam
• Electron Projection Lithography (EPL)
• EB stepper
• EPL reticle

Details

• CRID: 1571417125369458560
• NII Article ID: 10018989031
• NII Book ID: AN00346658
• Text Lang: ja
• Data Source:
  • CiNii Articles