A Metal-Contact Type Grounded Co-Planar Waveguide MEMS Switch

• MIYAGUCHI Kenichi

  Information Technology R&D Center, Mitsubishi Electric Corporation

• YOSHIDA Yukihisa

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• NISHINO Tamotsu

  Information Technology R&D Center, Mitsubishi Electric Corporation

• HANGAI Masatake

  Information Technology R&D Center, Mitsubishi Electric Corporation

• HIEDA Morishige

  Information Technology R&D Center, Mitsubishi Electric Corporation

• MIYAZAKI Moriyasu

  Information Technology R&D Center, Mitsubishi Electric Corporation

• TAKAGI Tadashi

  Information Technology R&D Center, Mitsubishi Electric Corporation

• ISHIDA Osami

  Information Technology R&D Center, Mitsubishi Electric Corporation

Bibliographic Information

Other Title

• 直接接触型GCPW MEMSスイッチ

Journal

• 電気学会研究会資料. EDD, 電子デバイス研究会

  電気学会研究会資料. EDD, 電子デバイス研究会 2003 (79), 29-33, 2003-11-18

Keywords

• Microelectromechanical System
• MEMS
• Switch
• GCPW

Details

• CRID: 1570854175415575168
• NII Article ID: 10018989540
• NII Book ID: AN1044178X
• Text Lang: ja
• Data Source:
  • CiNii Articles