High Performance Strained-SOI CMOS Technology : Degradation Mechanism for Carrier Mobility and Device Design

Bibliographic Information

Other Title
  • 高性能ひずみSOI-CMOS素子技術 : キャリア移動度劣化機構と素子設計

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Details 詳細情報について

  • CRID
    1571135650392706688
  • NII Article ID
    10018989870
  • NII Book ID
    AN1044178X
  • Text Lang
    ja
  • Data Source
    • CiNii Articles

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