A Self-align SiGe HBT/CMOS Technology for High Frequency and High-Speed Application

• OHUE Eiji

  Hitachi, Ltd.

• SHIMAMOTO Hiromi

  Hitachi Device Engineering Co., Ltd.

• ODA Katsuya

  Hitachi, Ltd.

• HAYAMI Reiko

  Hitachi, Ltd.

• KIYOTA Yukihiro

  Hitachi, Ltd.

• TANABE Masamichi

  Hitachi Device Engineering Co., Ltd.

• KONDO Masao

  Hitachi, Ltd.

• HASHIMOTO Takashi

  Hitachi, Ltd.

• HARADA Takahshi

  Hitachi, Ltd.

• WASHIO Katsuyoshi

  Hitachi, Ltd.

Bibliographic Information

Other Title

• 高周波・高速用途向け自己整合構造SiGe HBT/CMOS技術

Journal

• 電気学会研究会資料. EDD, 電子デバイス研究会

  電気学会研究会資料. EDD, 電子デバイス研究会 2001 (44), 1-5, 2001-03-08

Keywords

• SiGe HBT
• SEG, maximum oscillation frequency
• ECL
• delay time
• SiGe-BiCMOS

Details

• CRID: 1573387450179815680
• NII Article ID: 10018991924
• NII Book ID: AN1044178X
• Text Lang: ja
• Data Source:
  • CiNii Articles