Temperature Characteristics of Vibrating Type Sensor Using Micromachined Optical Fiber-Tip

• KUMAZAKI Hironori

  Department of Electrical Engineering, Gifu National College of Technology, Motosu, Gifu, 501–04 Japan

• INABA Seiki

  Department of Electrical Engineering, Gifu National College of Technology, Motosu, Gifu, 501–04 Japan

• HANE Kazuhiro

  Department of Mechatronics and Precision Engineering, Faculty of Engineering, Tohoku University, Aramaki–Aoba, Aoba–ku, Sendai, 980–77 Japan

抄録

An optical sensor using a quartz core microcantilever was fabricated by etching clad layer from optical fiber. The temperature dependence of the resonance frequency of this sensor was measured in atmosphere and water. The temperature coefficient of the resonance frequency in water was 1.30^-3/°C, which was about one order larger than that (2.30^-4/°C) in atmosphere. This was caused by increase of additional mass due to temperature dependence of the viscosity of water, while, the increase of the resonance frequency in atmosphere was caused by temperature dependence of Young's modulus of the quartz core. These results were evaluated theoretically using a "string-of-beads" model.

収録刊行物

• Optical Review

  Optical Review 3 (2), 135-138, 1996

  公益社団法人 応用物理学会分科会 日本光学会

キーワード

• optical fiber
• micromachine
• photothermal effect
• vibrating type sensor
• temperature dependence

詳細情報

• CRID: 1390282680503249024
• NII論文ID: 10019004238
• NII論文ID: 30016400989
• NII書誌ID: AA11029291
• DOI: 10.1007/s10043-996-0135-1
• BIBCODE: 1996OptRv...3..135K
• COI: 1:CAS:528:DyaK28XktlWqt7Y%3D
• ISSN: 13499432
• ISSN: 13406000
• Web Site: http://link.springer.com/content/pdf/10.1007/s10043-996-0135-1.pdf
• Web Site: http://link.springer.com/article/10.1007/s10043-996-0135-1/fulltext.html
• Web Site: http://link.springer.com/content/pdf/10.1007/s10043-996-0135-1
• 本文言語コード: en
• データソース種別:
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