MEMS 技術を用いて作製した人工キャビティ付き伝熱面による核沸騰現象の実験的研究

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  • Experimental Study on Fundamental Phenomena of Nucleate-Boiling by Using Heat Transfer Surface with Artificial Cavities Created by MEMS Technology
  • MBMS技術を用いて作製した人工キャビティ付き伝熱面による核沸騰現象の実験的研究
  • MBMS ギジュツ オ モチイテ サクセイシタ ジンコウ キャビティ ツキ デンネツメン ニ ヨル カク フットウ ゲンショウ ノ ジッケンテキ ケンキュウ

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Pool nucleate boiling heat transfer experiments were performed for water by using a well-controlled and -defined heat transfer surfaces in the range of the surface heat flux of ∼ 4.54×104 W⁄m2. One or three cavities were created on a mirror-finished silicon plate of 0.525 mm thickness by utilizing the Micro-Electro Mechanical Systems (MEMS) technology. In present experiments, the cavities were arranged in a straight line. The silicon plate was placed facing up at the bottom of the test container filled with distilled water. The back side of the silicon plate was irradiated by a laser beam to heat up the test heat transfer surface. The back side temperature was measured with a radiation thermometer. A boiling state was recorded with a high speed video camera. Thermal interaction between neighboring cavities became weak as the cavity spacing became wide and it disappeared when S⁄Lc = 1.6 in present experimental range. Four bubble coalescence patterns; vertical, horizontal and declining coalescence and vertical lift (no coalescence), were confirmed. When S⁄Lc ≥ 1.6, horizontal and declining coalescence disappeared. When the cavity spacing was narrow, hydraulic interaction between neighboring cavities played an important role in heat transfer. It became less important as the cavity spacing became wide. When S⁄Lc ≥ 1.2, the hydraulic interaction between neighboring cavities became negligible and phase change heat transfer took a main part.

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