水晶マイクロ加工による高感度傾斜角センサ High Sensitive Tilt Sensor for Quartz Micromachining

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Many kinds of tilt sensors have been developed and applied to the field of tilt angle measurement. However, the improvement of a "Size", "Cost", "Operability" and other "Performances" is expected. On the other hand, the high performance acceleration sensors were developed by MEMS technology, but there is almost no high sensitive MEMS sensor that detects a minute gravity change. We examined the possibility of development of tilt sensor fabricated by quartz crystal anisotropic-etching technology which is suitable for mass production.<br>The developed tilt sensor is constructed of "Beam spring", "Moving element" and "Capacitive detector of comb electrode". The feature of this sensor is that sensor chip is placed horizontally, and this arrangement enables fabrication of "Two axes sensor" on one wafer chip. We developed quartz tilt sensor using our laboratory fabrication process. Size of sensor chip is 5×5×0.1 mm<sup>3</sup>, and the evaluation result showed the highest level performance of 0.0001 degree resolution.

収録刊行物

  • 電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society  

    電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society 127(10), 431-436, 2007-10-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10019957910
  • NII書誌ID(NCID)
    AN1052634X
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    13418939
  • NDL 記事登録ID
    8960286
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-B380
  • データ提供元
    CJP書誌  NDL  J-STAGE 
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