Reliability of parameters of associated base straight line in step height samples : Uncertainty evaluation in step height measurements using nanometrological AFM

• MISUMI Ichiko

  National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)

• GONDA Satoshi

  National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)

• KUROSAWA Tomizo

  National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)

• AZUMA Yasushi

  National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)

• FUJIMOTO Toshiyuki

  National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)

• KOJIMA Isao

  National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (NMIJ/AIST)

• SAKURAI Toshihisa

  Tohoku University

• OHMI Tadahiro

  Tohoku University

• TAKAMASU Kiyoshi

  The University of Tokyo

収録刊行物

• Precision engineering

  Precision engineering 30 (1), 13-22, 2006-01-01

キーワード

• Reliability of parameters
• Step height
• Thickness
• Homodyne laser interferometer
• AFM
• Calibration
• Traceability
• Nanometrology
• Measurement strategy

詳細情報

• CRID: 1573668925316867968
• NII論文ID: 10020609392
• NII書誌ID: AA11537543
• ISSN: 01416359
• 本文言語コード: en
• データソース種別:
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