Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry
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- QUAN C.
- Department of Mechanical Engineering, National University of Singapore
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- WANG S. H.
- Department of Mechanical Engineering, National University of Singapore
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- TAY C. J.
- Department of Mechanical Engineering, National University of Singapore
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収録刊行物
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- Precision engineering
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Precision engineering 30 (1), 23-31, 2006-01-01
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詳細情報 詳細情報について
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- CRID
- 1570009750619266432
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- NII論文ID
- 10020609416
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- NII書誌ID
- AA11537543
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- ISSN
- 01416359
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- 本文言語コード
- en
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- データソース種別
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- CiNii Articles