Nanoscale surface deformation inspection using FFT and phase-shifting combined interferometry

• QUAN C.

  Department of Mechanical Engineering, National University of Singapore

• WANG S. H.

  Department of Mechanical Engineering, National University of Singapore

• TAY C. J.

  Department of Mechanical Engineering, National University of Singapore

収録刊行物

• Precision engineering

  Precision engineering 30 (1), 23-31, 2006-01-01

キーワード

• Optical interferometry
• Non-destructive measurement
• Phase-shifting technique
• Fast Fourier transform (FFT)
• Micro-components
• Piezoelectric transducer (PZT)

詳細情報

• CRID: 1570009750619266432
• NII論文ID: 10020609416
• NII書誌ID: AA11537543
• ISSN: 01416359
• 本文言語コード: en
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