Diagnostics of Scattering Atoms for High Sensitive Spectroscopy Using Low-Fluence Laser Ablation

• NAKAMURA Daisuke

  Graduate School of Information Science and Electrical Engineering, Kyushu University

• TAKAO Takayuki

  Graduate School of Information Science and Electrical Engineering, Kyushu University

• OKI Yuji

  Graduate School of Information Science and Electrical Engineering, Kyushu University

• MAEDA Mitsuo

  Kurume National College of Technology

Bibliographic Information

Other Title

• 低フルエンスアブレーションを利用した高感度分光分析における放出原子特性
• Laser Original 低フルエンスアブレーションを利用した高感度分光分析における放出原子特性
• Laser Original テイフルエンス アブレーション オ リヨウシタ コウカンド ブンコウ ブンセキ ニ オケル ホウシュツ ゲンシ トクセイ

Abstract

A low fluence UV laser ablation technique combined with Laser-Induced Fluorescence (LIF) spectroscopy is developed for an extreme trace element analysis of solid surface with a nanometer-scale depth resolution. Since the behavior of scattering atoms by the laser ablation was significant for improving the sensitivity of the analysis, the spatial distributions of the scattering atoms were investigated by a two dimensional imaging LIF spectroscopy method. Influences of a buffer gas and an assist mask on the atomic distributions were also investigated for enhancing the sensitivity of the analysis.

Journal

• The Review of Laser Engineering

  The Review of Laser Engineering 36 (4), 206-210, 2008

  The Laser Society of Japan

Keywords

• Laser ablation
• Atomic distribution
• LIF
• Surface analysis
• Trace element

Details

• CRID: 1390001204648537088
• NII Article ID: 10021105674
• NII Book ID: AN00255326
• DOI: 10.2184/lsj.36.4_206
• ISSN: 13496603
• ISSN: 03870200
• NDL BIB ID: 9479036
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9479036
• Web Site: https://www.jstage.jst.go.jp/article/lsj/36/4/36_206/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed