Phase-shift algorithm for white-light interferometry insensitive to linear errors in phase shift

• Adachi, Masaaki

Abstract

金沢大学理工研究域機械工学系

White-light interference has changes in fringe contrast. When phase-shift techniques are applied to white-light interference, the phase-shift algorithm which can extract the phase accurately under the contrast changes is required. There is often another requirement that the phase shift between frames should not be restricted to π/2. Computer simulations show that the well-known algorithms have non-negligible errors under both requirements. To find an algorithm which will satisfy the requirements, I extract individual terms (I j ∓ I k ) in an algorithmic equation by considering symmetry of light intensity against phase, where I j is light intensity just after the j-th phase shift. Using computer simulations, I search for appropriate coefficients by which the terms are multiplied in the equation, finally finding an algorithm which satisfies both the requirements with the phase shift used. © 2008 The Optical Society of Japan.

Journal

• Optical Review

  Optical Review 15 (3), 148-155, 2008-05-01

  Springer Verlag (Germany)

Keywords

• Algorithm
• Computer simulation
• Error estimation
• Fringe contrast
• Phase shift
• White-light interferometer

Details

• CRID: 1050001335933891072
• NII Article ID: 10021107040
• NII Book ID: AA11029291
• ISSN: 13406000
• Web Site: http://hdl.handle.net/2297/9976
• Text Lang: en
• Article Type: journal article
• Data Source:
  • IRDB
  • CiNii Articles
  • KAKEN