Fabrication of nanostructures using an optical near field and application to devices

• KAWAZOE Tadashi

  Department of Electronics Engineering, The University of Tokyo

Bibliographic Information

Other Title

• 近接場光を用いたナノ構造作製とデバイス応用
• キンセツバコウ オ モチイタ ナノ コウゾウ サクセイ ト デバイス オウヨウ

Abstract

An optical near field is a localized electromagnetic field coupled with excitations in a nanometric structure. Its localization results in high spatial resolution of the optical measurement tools and makes it applicable to nanometric fabrication and device operation. In this paper, I introduce optical chemical vapor deposition using the optical near field and a unique photochemical reaction (nonadiabatic near-field photochemical reaction). The results of photolithography using the nonadiabatic photochemical reaction are shown. The optical nanofountain, which concentrates optical energy in the nanometric region is explained as an example of an application to nanometric optical devices using the optical near-field.

Journal

• Oyo Buturi

  Oyo Buturi 77 (6), 662-667, 2008-06-10

  The Japan Society of Applied Physics

Keywords

• nanophotonics
• optical near field
• nanophotonic device
• photolithography
• photo-chemical vapor deposition

Details

• CRID: 1390282752333959424
• NII Article ID: 10021109295
• NII Book ID: AN00026679
• DOI: 10.11470/oubutsu.77.6_662
• ISSN: 21882290
• ISSN: 03698009
• NDL BIB ID: 9537045
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9537045
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • CiNii Articles
• Abstract License Flag: Disallowed