Miniaturization of surface patterns by combination of contact etching lithography and multi-step shrinking of stretched polymer films

• Hiroshi Yabu

• Masatsugu Shimomura

Bibliographic Information

Other Title

• Miniaturization of surface patterns by combination of contact etching lithography and multi step shrinking of stretched polymer films

Journal

• Polymer journal / Society of Polymer Science, Japan

  Polymer journal / Society of Polymer Science, Japan 40 (6), 534-537, 2008

  Tokyo : Springer Nature

Keywords

• Stretched Polymer Films
• Contact Etching Lithography
• Pattern Miniaturization

Details

• CRID: 1522543654565865216
• NII Article ID: 10021118095
• NII Book ID: AA00777013
• ISSN: 00323896
• NDL BIB ID: 9528927
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9528927
• Text Lang: en
• NDL Source Classification:
  • ZP16(科学技術--化学・化学工業--高分子化学・高分子化学工業)
• Data Source:
  • NDL
  • CiNii Articles