A Miniaturization of the Multi-Degree-of-Freedom Ultrasonic Actuator using a Small Cylinder Fixed on a Substrate

• GOUDA Y.

Journal

• Ultrasonics

  Ultrasonics 44 617-620, 2006

Details

• CRID: 1571980075516053376
• NII Article ID: 10021122517
• Data Source:
  • CiNii Articles