プラズマ支援重合法による高分子光導波路の形成 [in Japanese] Fabrication of an Optical Polymer Waveguide by Plasma Enhanced Polymerization [in Japanese]
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We have fabricated an optical polymer waveguide using plasma-enhanced polymerization. C<sub>6</sub>H<sub>6</sub> and C<sub>6</sub>H<sub>10</sub> are used as monomer materials for depositing core and cladding layer, respectively, because the refractive index of polymerized layers dominantly depend on the ratio of sp<sup>2</sup> and sp<sup>3</sup> bond in those. By decreasing rf power less than 0.04 W/cm<sup>2</sup> dangling-bonds formed in a polymer film will be suppressed, so that a relative low loss waveguide has been fabricated. We have measured propagation loss of those waveguides in end-fire method by using laser light at 787 nm wavelength. The losses are 3.2 cm<sup>-1</sup> for the samples plasma-polymerized in Ar.
- IEEJ Transactions on Fundamentals and Materials
IEEJ Transactions on Fundamentals and Materials 128(2), 75-80, 2008-02-01
The Institute of Electrical Engineers of Japan