環状水素化炭素モノマーを用いたプラズマ支援重合膜特性への堆積温度の影響 Effect of Deposition Temperature on the Thin Polymer Film Properties Deposited by Plasma Enhanced CVD Using Cyclo-Hexa-Hydrocarbon as Monomer

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Plasma CVD is a candidate technology to fabricate an optical polymer waveguide. It can deposit a film on any surface geometry and any material of substrate at temperature under 200 deg.C in vacuum process. Also, it provides good thickness controllability and uniformity of the deposition film. In the present study the effects of deposition temperature on film properties, those are refractive index, deposition rate, and molecular structure, are discussed. The refractive index decreases with elevating deposition temperature. The logarithm of deposition rare increases proportionally with the reciprocal temperature and the gradient of that depends on the ratio of double bond in monomer sources. The gradient does not change by using CF<sub>4</sub> instead of Ar as gas mixed in plasma, though the deposition rate increases about 5 times. Langmuir adsorption isotherm explains the temperature dependency of deposition rate. We speculate that the deposition rate increase due to precursor increasing by mixing CF<sub>4</sub> to plasma and due to dangling bonds increasing in the surface of deposition film by F radicals. And we also speculate that the precursors incorporated into the polymer are selected on a substrate by absorbed sites and absorption energy.

収録刊行物

  • 電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society  

    電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 128(4), 268-274, 2008-04-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10021129686
  • NII書誌ID(NCID)
    AN10136312
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    03854205
  • NDL 記事登録ID
    9451957
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-793
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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