環状水素化炭素モノマーを用いたプラズマ支援重合膜特性への堆積温度の影響 Effect of Deposition Temperature on the Thin Polymer Film Properties Deposited by Plasma Enhanced CVD Using Cyclo-Hexa-Hydrocarbon as Monomer
Plasma CVD is a candidate technology to fabricate an optical polymer waveguide. It can deposit a film on any surface geometry and any material of substrate at temperature under 200 deg.C in vacuum process. Also, it provides good thickness controllability and uniformity of the deposition film. In the present study the effects of deposition temperature on film properties, those are refractive index, deposition rate, and molecular structure, are discussed. The refractive index decreases with elevating deposition temperature. The logarithm of deposition rare increases proportionally with the reciprocal temperature and the gradient of that depends on the ratio of double bond in monomer sources. The gradient does not change by using CF<sub>4</sub> instead of Ar as gas mixed in plasma, though the deposition rate increases about 5 times. Langmuir adsorption isotherm explains the temperature dependency of deposition rate. We speculate that the deposition rate increase due to precursor increasing by mixing CF<sub>4</sub> to plasma and due to dangling bonds increasing in the surface of deposition film by F radicals. And we also speculate that the precursors incorporated into the polymer are selected on a substrate by absorbed sites and absorption energy.
- 電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society
電気学会論文誌. A, 基礎・材料・共通部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A, A publication of Fundamentals and Materials Society 128(4), 268-274, 2008-04-01
The Institute of Electrical Engineers of Japan