集束プロトンビーム描画による微細加工と応用 [in Japanese] Challenges in the Micromachining by Proton Beam Writing and its Applications [in Japanese]
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Proton beam writing (PBW) is a direct writing technique for the fabrication of micro- and submicron-scale structures with high-aspect ratio. The straight trajectory of MeV protons incident to target materials allows high-aspect-ratio micromachining with high throughput, when compared with a conventional direct writing process using low-energy electron beam. The principles and superior features of the PBW technique are illustrated by demonstrating the micromachining by PBW on various resists. Application of the high-aspect-pillar structures by PBW is also demonstrated for electro-micro filters using dielectrophoresis.
- IEEJ Transactions on Fundamentals and Materials
IEEJ Transactions on Fundamentals and Materials 128(7), 461-466, 2008-07-01
The Institute of Electrical Engineers of Japan