Challenges in the Micromachining by Proton Beam Writing and its Applications

• Nishikawa Hiroyuki

  Department of Electrical Engineering, Shibaura Institute of Technology

Bibliographic Information

Other Title

• 集束プロトンビーム描画による微細加工と応用
• シュウソク プロトン ビーム ビョウガ ニ ヨル ビサイ カコウ ト オウヨウ

Abstract

Proton beam writing (PBW) is a direct writing technique for the fabrication of micro- and submicron-scale structures with high-aspect ratio. The straight trajectory of MeV protons incident to target materials allows high-aspect-ratio micromachining with high throughput, when compared with a conventional direct writing process using low-energy electron beam. The principles and superior features of the PBW technique are illustrated by demonstrating the micromachining by PBW on various resists. Application of the high-aspect-pillar structures by PBW is also demonstrated for electro-micro filters using dielectrophoresis.

Journal

• IEEJ Transactions on Fundamentals and Materials

  IEEJ Transactions on Fundamentals and Materials 128 (7), 461-466, 2008

  The Institute of Electrical Engineers of Japan

Keywords

• direct write
• proton
• micromachining
• resist
• dielectrophoresis

Details

• CRID: 1390001204593383424
• NII Article ID: 10021130125
• NII Book ID: AN10136312
• DOI: 10.1541/ieejfms.128.461
• ISSN: 13475533
• ISSN: 03854205
• NDL BIB ID: 9564954
• Web Site: https://ndlsearch.ndl.go.jp/books/R000000004-I9564954
• Web Site: https://www.jstage.jst.go.jp/article/ieejfms/128/7/128_7_461/_pdf
• Text Lang: ja
• Data Source:
  • JaLC
  • NDL
  • Crossref
  • CiNii Articles
• Abstract License Flag: Disallowed