La_<0.5>Sr_<0.5>CoO_3の放電カソード材料としての電気特性 Electrical Characteristics of the La_<0.5>Sr_<0.5>CoO_3 As a Cathode

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The La<sub>0.5</sub>Sr<sub>0.5</sub>CoO<sub>3</sub> was used as a cathode for the first time when the plasma display panel was used on the handheld personal computer. It has favorable sputtering resistance characteristic and stable discharge characteristic in gases. In this report, the electrical characteristics of the La<sub>0.5</sub>Sr<sub>0.5</sub>CoO<sub>3</sub> was investigated through an analysis of the DC plasma panel which was made as prototype. The dimensions of the test plasma panel were measured exactly by the end-measuring machine, and its electric properties were estimated. On the analysis of the DC plasma panel, LaB<sub>6</sub> and metal Ni cathode were investigated in the same way, and the comparative analysis was carried out. From the analysis in sputtering experiment that was conducted in the AC-type sputtering apparatus, the sputter rate of La<sub>0.5</sub>Sr<sub>0.5</sub>CoO<sub>3</sub> is greater than the LaB<sub>6</sub>'s one, while the sputter rate of La<sub>0.5</sub>Sr<sub>0.5</sub>CoO<sub>3</sub> that is used as a cathode, is smaller than others. The La<sub>0.5</sub>Sr<sub>0.5</sub>CoO<sub>3</sub> has larger secondary-emission coefficient γ than LaB<sub>6</sub> or metal Ni. It was presumed that La<sub>0.5</sub>Sr<sub>0.5</sub>CoO<sub>3</sub>'s larger secondary-emission coefficient γ reduce the sputter rate when it is used as a cathode.

収録刊行物

  • 電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society  

    電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society 128(4), 576-582, 2008-04-01 

    The Institute of Electrical Engineers of Japan

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各種コード

  • NII論文ID(NAID)
    10021132018
  • NII書誌ID(NCID)
    AN10065950
  • 本文言語コード
    JPN
  • 資料種別
    ART
  • ISSN
    03854221
  • NDL 記事登録ID
    9451364
  • NDL 雑誌分類
    ZN31(科学技術--電気工学・電気機械工業)
  • NDL 請求記号
    Z16-795
  • データ提供元
    CJP書誌  CJP引用  NDL  J-STAGE 
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