薄膜結晶成長における半導体レーザ応用の新展開 [in Japanese] New Development of Semiconductor Laser Application in Thin-Film Crystal Growth [in Japanese]
Access this Article
Search this Article
We describe the use of continuous-wave semiconductor diode laser beam as a heating source in thin film deposition system. One of the examples is heating of organic materials for sublimation to replace conventional Knudsen cell. The other is heating of the substrate to very high temperature (>1000°C) which can hardly be achieved by conventional resistive or lamp heaters. Many of the advantages come from the pin-point heating on demand that is enabled by the excellent directionality of high power laser beam.
- IEEJ Transactions on Electronics, Information and Systems
IEEJ Transactions on Electronics, Information and Systems 128(5), 699-702, 2008-05-01
The Institute of Electrical Engineers of Japan